3.7 Find the end-to-end resistance of a bar 15-µm long, 3-µm wide, and 1-µm thick, made of the following materials at 25°C:
(a) intrinsic silicon
(b)n-doped silicon with ND = 5 × 1016/cm3
(c) n-doped silicon with ND = 5 × 1018/cm3
(d)p-doped silicon with NA = 5 × 1016/cm3
(e) aluminum with resistivity of 2.8 µΩ·cm
For intrinsic silicon, use the data in Table 3.1. For doped silicon, assume μn = 3μp = 1200 cm2/V · s. (Recall that R = ρL/A.)
(a) 11.4 × 109 Ω; (b) 5 kΩ; (c) 50Ω; (d) 15.63 kΩ; (e) 0.14Ω
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